http://industrial-heating-ir.com/zh/tags/%E5%8E%BB%E7%81%B0/ Recent content in 去灰 on Industrial IR Heating Solutions Hugo zh Sat, 06 Jun 2026 04:13:08 +0800 http://industrial-heating-ir.com/zh/posts/ashing-process-heating-infrared/ Sat, 06 Jun 2026 04:13:08 +0800 http://industrial-heating-ir.com/zh/posts/ashing-process-heating-infrared/ <p><img src="http://industrial-heating-ir.com/images/c4487c91a5d0bd93963bf8b3a19ba704.png" alt="灰化过程加热红外线"></p> <p>在晶圆厂车间，不能将灰化视为一个黑匣子。剥离后残留的光刻胶会影响良率，如果热轮廓不稳定，可能会导致整批晶圆报废。采用经过工程设计的红外灰化加热可以实现每次重复的热预算。</p>